Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry
Mon, 2012-07-30 07:33 — Guest
Abstract
The absolute optical thickness and the surface shape of a glass plate of 7-in. square and 3.1mm thick was simultaneously measured
by three-surface interferometry using a wavelength tuning Fizeau interferometer. The wavelength of a tunable diode laser is
scanned linearly from 632 to 642 nm, at which the initial and the final phases of the interference fringes for the surface
shape and for the optical thickness were separated and measured by a tunable phase-shifting technique. The number of phase
variations in the interference fringes during the scanning is counted by discrete Fourier analysis, in which systematic errors
caused by a nonlinearity in the wavelength scanning is corrected by a correlation analysis between the observed and theoretical
interference fringes. Experimental results demonstrate that the systematic errors in the measured value were 15 nm for the
surface shape and 0.6 μm for the absolute optical thickness.
by three-surface interferometry using a wavelength tuning Fizeau interferometer. The wavelength of a tunable diode laser is
scanned linearly from 632 to 642 nm, at which the initial and the final phases of the interference fringes for the surface
shape and for the optical thickness were separated and measured by a tunable phase-shifting technique. The number of phase
variations in the interference fringes during the scanning is counted by discrete Fourier analysis, in which systematic errors
caused by a nonlinearity in the wavelength scanning is corrected by a correlation analysis between the observed and theoretical
interference fringes. Experimental results demonstrate that the systematic errors in the measured value were 15 nm for the
surface shape and 0.6 μm for the absolute optical thickness.
- Content Type Journal Article
- Category Regular Papers
- Pages 247-253
- DOI 10.1007/s10043-012-0038-2
- Authors
- Kenichi Hibino, National Institute of Industrial Science and Technology, Tsukuba, Ibaraki, 305-8563 Japan
- Yangjin Kim, The University of Tokyo, Bunkyo, Tokyo, 113-8656 Japan
- Sangyu Lee, LG Electronics, Pyeongtaek, Gyeonggi, 451-713 Korea
- Yohan Kondo, National Institute of Industrial Science and Technology, Tsukuba, Ibaraki, 305-8563 Japan
- Naohiko Sugita, The University of Tokyo, Bunkyo, Tokyo, 113-8656 Japan
- Mamoru Mitsuishi, The University of Tokyo, Bunkyo, Tokyo, 113-8656 Japan
- Journal Optical Review
- Online ISSN 1349-9432
- Print ISSN 1340-6000
- Journal Volume Volume 19
- Journal Issue Volume 19, Number 4
- Feed: Optical Review
- Original article
- 132 reads
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